화학공학소재연구정보센터
Journal of Crystal Growth, Vol.209, No.4, 567-571, 2000
Growth of InSb on GaAs using InAlSb buffer layers
We report the growth of InSb on GaAs using InAlSb buffers of high interest for magnetic field sensors. We have grown samples by metal-organic chemical vapor deposition consisting of similar to 0.55 mu m thick Insb layers with InAlSb buffers on GaAs substrates with measured electron mobilities of similar to 40000 cm(2)/V s. We have investigated the In1-xAlxSb buffers for compositions x less than or equal to 0.22 and have found that the best results are obtained near x = 0.12 due to the tradeoff of buffer layer band gap and lattice mismatch.