화학공학소재연구정보센터
Journal of Crystal Growth, Vol.213, No.1-2, 150-156, 2000
Determination of the three-dimensional crystallographic misorientation in heterostructures by selected area diffraction (SAD) in cross-sectional TEM
We proposed a concise and novel scheme to determine the crystallographic misorientation of heteroepitaxial structures. In addition to subtle high-resolution transmission electron microscopy images, the information revealed from selected-area diffraction patterns at the interfaces offers another path to determine the angles of misorientations. The principle is to extract the basically three-dimensional misorientation information from a two-dimensional selected-area diffraction patterns through the employment of the Laue circle.