화학공학소재연구정보센터
Journal of Crystal Growth, Vol.221, 496-502, 2000
Effect of growth conditions and strain compensation on indium incorporation for diode lasers emitting above 1050 nm
Diode lasers with an emission wavelength of up to 1150 nm have been grown by metalorganic vapor-phase epitaxy (MOVPE). For the growth of the highly strained InGaAs/GaAs quantum wells low growth temperatures are found favorable to suppress defect formation. An incorporation of GaAsP strain compensating layers reduces indium carry-over effects but the defect formation in the InGaAs quantum well starts at lower indium content. At high TMIn/(TMIn + TMGa) ratio in the vapor phase no temperature dependence of indium incorporation efficiency was obtained. Broad-area (1 mm long. 100 mum wide) diode lasers using such QWs in GaAs waveguide and AlGaAs cladding layers show very low threshold current densities (jth = 93 A/cm(2) at 1102 nm and jth = 85 A/cm(2) at 1152 nm). Ridge-waveguide diode lasers (750 mum long. 3 mum wide) with a low threshold current of 9 mA and an efficiency of more than 90% were fabricated.