화학공학소재연구정보센터
Journal of Crystal Growth, Vol.221, 699-703, 2000
Microcavities with distributed Bragg reflectors based on ZnSe/MgS superlattice grown by MOVPE
Monolithic II-VI semiconductor microcavities for the blue-green region grown by metal-organic vapor-phase epitaxy have been demonstrated. ZnSe/MgS-superlattice (ZnSe/MgS-SL) layers were used for the distributed Bragg reflectors (DBRs). The DBR with only 5 periods showed the high reflectivity of 92% at the wavelength of 510 nm due to the large difference of refractive indices between ZnSe acid MgS layers. In a monolithic II-VI microcavity structure based on these DBRs, a clear cavity resonance mode was observed in the blue-green region for the first time.