Previously, we investigated surface morphologies of the samples by atomic force microscopy (AFM), and found an abrupt change in the terrace width and the supersaturation ratio at a deposition temperature of around 750 degreesC. We proposed the appearance of a quasi-liquid on the growing crystal surface and this transition temperature corresponds to the growth mode change from the conventional vapor growth to the vapor-liquid-solid (VLS) growth. We prepared and characterized the YBCO films grown by a novel growth method using the VLS mode at various temperatures with addition of fluorine and silver to stabilize the liquid layer of Ba-Cu-O. The growth rate at 850 degreesC of the films using the VLS mode is typically about five times as high as those using the conventional vapor growth. The YBCO obtained film is dense and its crystallinity is as good as the films prepared by liquid phase epitaxy.