화학공학소재연구정보센터
Journal of Crystal Growth, Vol.230, No.3-4, 421-425, 2001
MBE growth of cubic AlyGa1-yN/GaN heterostructures structural, vibrational and optical properties
Cubic AlyGa1-yN/GaN heterostructures on GaAS(0 0 1) substrates were grown by radio-frequency plasma-assisted molecular beam epitaxy. High resolution X-ray diffraction, micro-Raman, spectroscopic ellipsometry, and cathodoluminescence measurements were used to characterize the structural, optical and vibrational properties of the AlyGa1-yN epilayers. The AlN mole fraction y of the alloy was varied between 0.07 2001 Elsevier Science B.V. All rights reserved.