ZnO films were prepared on ITO/glass substrates by pulsed current electrolysis. The preferred orientation of the ZnO films was changed by varying pulse parameters such as the cathodic average current density and the pulse period. The change of the preferred orientation for ZnO films prepared by the pulsed current electrolysis agreed nearly with that predicted by the two-dimensional nucleus theory presented by Pangarov. It was suggested that the change of the preferred orientation of the ZnO films was caused by the effect of the pause of electrolysis in addition to that of the overvoltage. As a result, it was demonstrated that the preferred orientation of the ZnO thin films could be controlled by regulating pulse conditions for the pulsed current electrolysis. (C) 20021 Elsevier Science B.V. All rights reserved.