Sol-gel-derived epitaxial ferroelectric Pb(Zr0.52Ti0.48)O-3 (PZT) thin films with varied thicknesses of 40 nm-2.4 mum were successfully fabricated on LaAlO3 substrates using inorganic zirconium salt as precursor. Perovskite phase formation was achieved by rapid thermal annealing at 680degreesC. Thickness dependence of the structural and morphological properties of these epitaxial PZT films were investigated by means of X-ray diffractometry, scanning electron microscopy and atomic force microscopy. Thicker films showed progressively better epitaxy, improved density and smaller surface roughness. Our results suggested that this inorganic based sol-gel method is suitable for growth of epitaxial PZT thick films of up to several micrometers. (C) 2002 Elsevier Science B.V. All rights reserved.