YBa2Cu3O7 (YBCO) films are manufactured on (1 1 0) STO at 600-800degreesC by pulsed laser ablation, and the crystal structure and the surface morphology in the obtained films are investigated by X-ray diffractometer (XRD), scanning electron microscopy (SEM) and cross-sectional transmission electron microscopy (TEM). With increasing substrate temperature, the dominant crystalline structure in the deposited YBCO film changes in the order of amorphous, (0 13), (1 1 0) (1 0 0) and (0 0 1). This sequence, which is related to the change in the surface morphology, is explained by considering the coherency in the lattice constant and the atom configuration. The single-oriented (1 1 0) films are obtained by deposition at 700degreesC and 725degreesC, in which cracks or crack-like faults are formed. It is concluded that these faults are induced during deposition due to the slow growth in [0 0 1] direction.