We investitated the structural and electrical properties of the Ba(ZrxTi1-x)O-3 (BZT) thin films with a mole fraction of x = 0.2 and thickness 150 nm for application in a multilayer ceramic capacitor (M I-CC). BZT films were prepared oil Pt/SiO2/Si substrates at various substrate temperatures using an RF-magnetron sputtering, system. When the substrate temperature was above 500degreesC. We could obtain multi-crystalline BZT films oriented in <110>, <111> and <200> directions. Crystallization of the film and a high dielectric constant were observed with increase of substrate temperature. Capacitance of the film deposited at high temperature is more sensitive to the applied voltage than that of the film deposited at low temperature. This paper reports surface morphology. dielectric constant dissipation factors and C V characteristics for BZT films deposited at three different temperatures. The BZT film deposited at 400degreesC shows stable electrical properties but a small dielectric constant For MLCC applications. (C) 2002 Elsevier Science B.V. All rights reserved.