Domain structures and their volume fraction in (001)-, (101)- and (111)-oriented epitaxial Pb(Zr0.6Ti0.4)O-3 (PZT) films grown on (001), (110) and (111) SrTiO3 (STO) single crystal substrates, respectively, were characterized by using a high-resolution X-ray diffraction reciprocal space mapping (RSM) technique. The results of RSM revealed the presence of (10 (1) over bar) and (11 (1) over bar) orientation as well as (110) and (111) orientations for the films grown on (110) and (111) STO substrates, respectively, although (001)-oriented film had (001)-oriented simple domain structure. These multiple domain configurations seemed to be introduced by {100} and {101} twin domain boundaries. The RSM analysis also showed that the relative volume fractions of (10 (1) over bar) and (11 (1) over bar) orientations were 22% and 52% against (110) and (111) orientations, respectively. (C) 2002 Elsevier Science B.V. All rights reserved.