Pulsed laser deposition (PLD) with a KrF excimer laser Was Used to prepare epitaxial TiO2 films oil a (0001) sapphire substrate. The crystalline structure and surface morphology of the films were then investigated as a function of the laser fluence in the PLD. X-ray diffraction and Raman spectroscopy results showed that the films were composed of the (100) oriented rutile phase With a small amount of the (001) oriented anatase. The anatase-to-rutile ratio in such phase-mixed films was controlled by the laser fluence the ratio increased LIS the fluence decreased. From atomic force microscopy observations, the film deposited at the lowest I'll-Mice was found to have a rough surface consisting of coarse grains. This film exhibited the best photocatalytic performance during the decomposition of the organic dyes possibly due to the maximum relative Content of anatase and the large surface area. (C) 2002 Elsevier Science B.V. All rights reserved.