The present paper is the first description on the preparation of B Sb films by molecular flow region PVD method using the reaction of decaborane gas with evaporated antimony gas on Si(I 0 0) substrate at the temperatures 200-400degreesC. The cracking of evaporated Sb-2 into Sb-1 produced the films with the composition of amorphous B12Sb2 determined by X-ray photoelectron spectroscopy and infrared spectra. Ohmic metals of the films were examined by making evaporated Ag followed by annealing at 200degreesC. (C) 2002 Elsevier Science B.V. All rights reserved.