The epitaxial growth of Se100-xTex alloy films deposited on air-cleaved (10 0) surfaces of KI and KBr has been studied by transmission electron microscopy and diffraction. The substrate temperature was varied from room temperature to 180degreesC. The composition x was varied from 0 to 100 at%. Epitaxial Se and Se95Te5 alloy films on KI(100) show the (10 (1) over bar0), [0001]Se, Se(95)Te(5)parallel to(100), and [110][1 (1) over bar0]KI. However, the azimuthal orientations of Se100-xTex alloy films worsen with increasing composition x, and the c-axes of pure Te films deviate about +/-8degrees from [110] directions of KI. On the other hand, the c-axes of Se films deposited on KBr(100) deviate about +/-2.5degrees from [110] directions of KBr. The deviation from [110] directions of the c-axes of Se100-xTex alloy films deposited on KBr decreases with increasing Te content. Epitaxial Se5Te95 and Te films on KBr show the (10 (1) over bar0), [0001]Se5Te95, Teparallel to(100), [110][1 (1) over bar0] KBr. (C) 2002 Elsevier Science B.V. All rights reserved.