화학공학소재연구정보센터
Journal of Crystal Growth, Vol.250, No.1-2, 189-194, 2003
Prediction of the melt/crystal interface geometry in liquid encapsulated Czochralski growth of InP bulk crystals
Prediction of the crystallization front geometry largely affecting crystal defects and growth stability is a crucial issue in numerical simulation of InP liquid encapsulated Czochralski (LEC) growth. In this paper, a comprehensive numerical analysis using various two-dimensional (2D) steady and 3D unsteady models is performed. A 3D unsteady model including the interface shape calculation is presented for the first time. The 3D model is combined with axisymmetric calculations of heat and mass transfer in the entire LEC furnace. Results obtained with different numerical approaches are analyzed and compared to available experimental data. (C) 2002 Elsevier Science B.V. All rights reserved.