The formation and orientation Of Y2O3 inclusions in pulsed laser deposited YBa2Cu3O7-delta films by using Y2BaCuO5-containing melt-textured target have been studied by X-ray diffractometry and transmission electron microscopy. The results show that Y2O3 inclusions, rather than the Y2BaCuO5 phase contained in the target, are formed in the films. [1 1 1]- and [10 0]-oriented Y2O3 inclusions have been found in the YBa2Cu3O7-delta films. The orientation Of Y2O3 inclusions is dependent on the deposition temperature. If the deposition temperature is high enough, [I I 1]-oriented Y2O3 can be inhibited. The reasons for the formation Of Y2O3 inclusions and their orientation are discussed. (C) 2003 Elsevier Science B.V. All rights reserved.