Highly c-axis oriented crystalline ZnO thin films were prepared on glass substrates by reactive deposition using zinc acetate as the zinc source. The structural, optical, and electrical properties of the ZnO samples were investigated using XRD, UV-Vis absorption and Hall-effect measurements. The dependences of the film properties on the substrate temperature and the source temperature were studied, and the optimal parameters were obtained. Factors that affect the carrier mobility were also analyzed. (C) 2003 Elsevier Science B.V. All rights reserved.