Green emitting SrGa2S4:Eu thin films have been prepared by reactive RF magnetron sputtering. Electron Probe MicroAnalysis, X-ray diffraction, Micro-Raman spectroscopy and roughness measurements were used to study the growth of SrGa2S4:Eu and to determine the effects of the post-deposition heat treatment on the morphological and structural properties. The post-deposition annealing is a necessary step for the layer crystallisation, it influences the film composition and the structural properties leading to the improvement of luminescence performances. Photoluminescence properties as a function of annealing parameters are reported. (C) 2003 Elsevier B.V. All rights reserved.