The paper overviews research activities at the "Research Center for Ultra Precision Science T Technology of Osaka University". It describes the motivation of the research, and the physical concepts of new ultraprecision machining methods; i.e. elastic emission machining (EEM), plasma chemical vaporization machining (PCVM), atmospheric pressure plasma chemical vapor deposition (PCVD), and hydroxyl electrochemical machining (H-ECM), and some application examples achieved by utilizing above methods are introduced. (c) 2004 Elsevier B.V. All rights reserved.