Ferroelectric thin films of (Ba0.7Sr0.3)TiO3 (BST) were deposited on Pt/Ti/SiO2/Si by soft-solution processing. Crystalline films with perovskite structure were obtained by post-deposition annealing at a temperature of 650 degrees C. X-ray diffraction (XRD) studies have been carried out to assess the crystallinity and phase formation. The surface features of BST films were observed by atomic force microscopy (AFM). The transmittance properties of BST films on fused silica substrate were measured by spectrophotometer. Electric characterization of BST films in metal-ferroelectric-metal (MFM) configuration had been carried out by HP4192A and TF Analyzer2000 standardized ferroelectric test system, respectively. The results confirmed that the soft-solution processing provided an environmentally friendly route for the preparation of BST thin films with low annealing temperature and excellent ferroelectric properties. (c) 2004 Elsevier B.V. All rights reserved.