Journal of Crystal Growth, Vol.298, 511-514, 2007
InGaN multiple quantum wells grown on ELO GaN templates and the optical properties characterization
Epitaxial lateral overgrowth of gallium nitride with (11 (2) over bar2) facets was realized by metal organic chemical vapor deposition on GaN/sapphire (0 0 0 1) substrates with SiO2 stripe mask. After wet etching of the mask, periodic multiple quantum wells (MQWs) InGaN/GaN structures were grown on the whole surface. Cross-sectional transmission electron microscopy (TEM) showed that a higher growth rate on (0 0 0 1) plane compared to (I I (2) over bar 2) facet. The well thickness and In composition of the quantum wells (QWs) were analyzed by the cross-sectional and high resolution X-ray diffraction (HR-XRD) measurements. Micro photoluminescence spectra confirmed that the ELO InGaN/GaN MQWs structures on the (I 1 (2) over bar2) plane provide nearly multi-wavelengths output light. This is suitable for display devices based on the white color optical system. (c) 2006 Published by Elsevier B.V.