We report the growth of (Cu C)Ba2Ca(n-1)CUnOY (n = 1-4) superconducting thin films by the molecular beam epitaxy method. The film was c-axis oriented for n = 1, and was changed to a-axis oriented with 90 degrees domains for n = 2-4. All the films exhibited superconductivity and their T-c's were T-c(on) = 35 K and T-c(zero) = 18 K for n = 1, T-c(on) = 80 K and T-c(zero) = 52 K for n = 2, T-c(on) = 85 K and T-c(zero) = 42 K for n = 3, and T-c(on) = 105 K and T-c(zero) = 53 K for n = 4. (c) 2006 Elsevier B.V. All rights reserved.