Ternary single-phase Zn1-xCdxO alloy semiconductor films were obtained by means of cathodic deposition. Crystalline thin films with cadmium concentrations ranging from about 0.4% to 9% were electrodeposited onto glass conductive substrates and subsequently annealed in air at 300 degrees C. XRD studies confirm a hexagonal wurtzite structure for the ternary alloy compounds. The amount of cadmium incorporated in the electrodeposited films, which was measured by EDS, produces a red shift of the absorption edge of the alloy semiconductor films proportional to the cadmium content. A linear relationship has been found between the width of the film and the deposited electric charge. (C) 2007 Elsevier B.V. All rights reserved.