Thin films of transition metal oxides are of interest in many applications such as anticorrosion coatings and optical and electrochromic devices, In this work, the effect of different wavelength and pulse duration on ablation of oxides target has been investigated. The plume has been characterized by mass spectrometry and optical spectroscopy. Ablation thresholds have been measured by detecting ion emission from the target and from the onset of the plume luminescence. Morphology and optical properties of thin films deposited in different conditions are presented.