New processing strategies for the fabrication of three-dimensional (3D) topographies with complex design, e.g., described by mathematical functions of the type z = xy, are presented. For the fabrication of such topographies we used either a combination of gray scale and contour mask techniques or an improved contour mask technique consisting of two diagonal-scanning contour masks moving behind an extra aperture mask. Details of the experimental procedure and the technical requirements are discussed and examples of machined surfaces are presented.