화학공학소재연구정보센터
Applied Surface Science, Vol.157, No.4, 337-342, 2000
Using higher flexural modes in non-contact force microscopy
The oscillation characteristics of higher flexural modes of a rectangular microfabricated silicon cantilever have been studied in ultra-high vacuum (UHV) for a free cantilever and for a typical situation in non-contact force microscopy. The results are discussed with respect to the use of such modes in dynamic force microscopy (DFM) and local dissipation measurements.