화학공학소재연구정보센터
Applied Surface Science, Vol.167, No.1-2, 12-17, 2000
Work function change caused by alkali ion sputtering of a sample surface
The steady state ion sputtering of a solid surface was studied. Based on a simple model, the surface concentration of ions implanted during sputtering was calculated in the case of cesium ion sputtering of silicon. The corresponding work function shift was calculated using the model developed.