Applied Surface Science, Vol.168, No.1-4, 136-140, 2000
Analysis of the plume expansion from laser ablated SmBaCuO target
The plasma produced by laser ablation of a Sm1Ba2Cu3O7-x, target was investigated by means of optical emission spectroscopy. Optical spectroscopy provides information on the composition of the species presented in the plume and on their time evolution. Intensified charge coupled device photography gives information on the velocities of the charged and neutral species in the expanding plume. The deposited films have been analyzed by means of time of flight mass spectroscopy