화학공학소재연구정보센터
Applied Surface Science, Vol.172, No.3-4, 356-365, 2001
Ablation of cobalt with pulsed UV laser radiation
The ablation of cobalt with 20 ns pulses of 308 nm XeCl excimer laser radiation is investigated. The dependence of the ablation rate on laser fluence, spot area, and pulse number is determined. The experimental results are compared with a numerical calculation based on an improved thermal model. The model, which considers proper vapor attenuation, is shown to be in good agreement with experiment.