Highly oriented VO2(B), V6O13 and V2O5 thin films have been deposited on fused silica substrates by RF magnetron sputtering. X-ray diffraction characterization revealed that all the three films were single phases and strongly oriented with the (0 0 1) planes parallel to the substrates, The micro-Raman scattering spectra of the films were reported. The results were compared to the micro-Raman scattering spectra of the film obtained by annealing the as-deposited VO2(B) film, it was found that the surface of the annealed film consisted of three regions of the black V6O13 region, the yellow VO2(B) region and the white non-crystalline region,