Applied Surface Science, Vol.177, No.4, 213-220, 2001
Kinetic Monte Carlo study of the terrace width distribution during step bunching in homoepitaxial growth
We describe the kinetics of the step bunching instability of a miscut (vicinal) surface by studying the distribution of terrace widths as a function of deposition time. The results are compared with models previously developed for equilibrium situations. This analysis allows a quantitative description of the surface structure and of its appearance.
Keywords:homoepitaxial growth;vicinal single crystal surfaces;step bunching;kinetic Monte Carlo simulations;terrace width distribution;kinetic phenomena