A non-contact atomic force microscope (NC-AFM) based on a microfabricated piezoelectric cantilever is presented. A single piezoelectric lead zirconate titanate thin film layer on the cantilever serves as deflection sensing, cantilever oscillation and feedback actuation. Since such an AFM requires neither external oscillator nor external deflection sensor, considerably simple instrumentation becomes possible even for extreme environments such as low temperature or ultra-high vacuum. Also feedback control by the integrated actuator in the cantilever makes faster scanning possible. Images of atomic steps on annealed sapphire (0001) surfaces have been observed in air atmosphere in frequency modulation mode. (C) 2002 Elsevier Science B.V. All rights reserved.