화학공학소재연구정보센터
Applied Surface Science, Vol.197, 325-330, 2002
Study of expansion of laser ablation plumes of Ga and GaN in various N-2 atmospheres using stigmatic emission spectroscopy
The dynamics of expansion of laser ablation plumes of Ga and GaN in various N-2 atmospheres is studied using stigmatic ultraviolet emission spectroscopy. This technique allows the simultaneous recording of the plume absolute emission intensities up to 4 cm above the target surface in the spectral range from 240 to 500 nm. At 250 nm, the spatial resolution of the system is similar to80 mum and its spectral resolving power is similar to40,000. The variations of the intensities and widths of selected lines as a function of laser wavelength, laser fluence and N-2 ambient pressure are presented. (C) 2002 Elsevier Science B.V All rights reserved.