Intermetallic coatings were produced by ablation of the FeAl and Ni3Al alloys using a KrF laser ( lambda = 0.248 mum, tau similar to 20 ns). The energy densities of laser radiation used for deposition were in the range 2-12 J/cm(2). Fine-grained microstructure of thickness in the range from 50 to 1000 nm was formed in the deposited films. The thickness of deposited layers was dependent on substrate temperature and ion energy. Diffractometric measurements have shown that at high laser energy fluence in the case of the FeAl target, the matrix comprises the polycrystalline Fe3Al intermetallic phase, while at low fluence the matrix comprises a solid solution of aluminum in iron (amorphous phase). In the case of the Ni3Al target, the matrix comprises the polycrystalline Ni5Al3 orthorombic and Ni3Al4 cubic phases. The results of the stoichiometric analysis and morphology examinations of deposited layers are also discussed. (C) 2002 Published by Elsevier Science B.V.