Epitaxially grown Pb(Zr,Ti)O-3 (PZT) thin films have been successfully prepared by the coating photolysis process using ArF. excimer laser at room temperature. Starting materials lead-2-ethylhexanoate, zirconium-2-ethylhexanoate oxide and titanium-2-ethyl-1-hexanolate were mixed and diluted with toluene, spin-coated on the single crystal SrTiO3 (STO)(0 0 1) substrate and dried at 150 C. When dried films were irradiated by ArF excimer laser at a fluence of 50-80 mJ/cm(2) at a repetition rate of 10 Hz for 1 min (600 shots), epitaxially PZT perovskite phase films were obtained. Single crystal LaAlO3 (LAO)(0 0 1) and quartz were also used as the substrate, PZT thin films which were grown on STO showed best crystallinity. (C) 2002 Elsevier Science B.V. All rights reserved.