Films are deposited on substrates at 20 degreesC by excimer laser ablation (ELA) of mixture targets of 3,4,9,10-perylenetetracarboxylic dianhydride (PTCDA) with metal powder, PTCDA/M (M = Co, Ni, Fe, W Cu and Ag) using XeCl and ArF beams. Large amount of fragments with "naked" perylene skeletons can be produced owing to effective elimination of carboxylic dianhydride groups by ELA of PTCDA/Co both with XeCl and ArF beams under optimized ablation conditions. Elimination reaction of side groups of PTCDA is observed for ELA of the targets with metal powder of the iron group, Co, Fe and Ni, especially remarkable for Co and Fe. The film from PTCDA/Ni consists of small particles with the various diameters ranging from 10 to 100 nm as well as that from PTCDA/Co. Morphology like petal of rose can be seen everywhere for the film from PTCDA/Fe. (C) 2002 Published by Elsevier Science B.V.