The round robin study of reference standards of Cl-35, (32) S and C-12 implanted into Cu films using five SIMS instruments from Taiwan SIMS users was attempted. Significant differences in RSFs but similarity in maximum peak concentration among different instruments was observed. For Cl-35, (32) S and C-12 measured using Cameca ims-6f, the RSF is 3.67E+19, 5.44E+20, 4.24E+21, the detection limit is 2.5E+16, 3.17E+16, 2.34E+18, and the dynamic range is 8.11E+3, 2.22E+4, 2.3E+1, respectively. The exchangeable use of RSF is recommended among model-specific instruments. (C) 2002 Elsevier Science B.V. All rights reserved.