The diamond films on copper substrates using C-60 as intermediate have been grown by the hot filament chemical vapor deposition (HFCVD) technique. Scanning electron microscopy (SEM) and micro-Raman spectra were used to study the process of diamond nucleation. The UV-Iight pretreatment was beneficial for improving the diamond nucleation. The temperature of the substrate is very important. The C-60 molecule layers with UV-light pretreatment could increase the density of diamond nuclei on copper substrates and enhance the adherence between the copper substrates and diamond films. The long induction time for forming graphite intermediate is not necessary. (C) 2002 Elsevier Science B.V. All rights reserved.