Based on absorption spectra of lanthanum modified lead zirconate titanate Pb0.9La0.1(Zr0.65Ti0.35)O-3 (PLZT10/65/35) ferroelectric ceramics an idea of local and selective treatment of lead zirconite titanate Pb(ZrxTi1-x)O-3 (PZT) sol-gel film in the multi-layer structure by CO2 laser radiation was formulated. The possibility to obtain PZT perovskite film on the SiO2/Si substrate by irradiation with CO2 laser was shown experimentally. X-ray studies revealed the PZT perovskite structure ratio growth at the expenses of pirochlore structure with an increased power density of laser radiation. (C) 2002 Elsevier Science B.V. All rights reserved.