The dependence of the structural and cathodoluminescent (CL) characteristics of green-emitting Y2O3:Er thin films phosphors deposited by electron beam evaporation on substrate used for the Y2O3:Er thin film deposition has been investigated. Quartz glass, ITO glass and c-axis-oriented ZnO thin film substrates were used as the substrate. Best crystallinity and CL luminance were obtained from the Y2O3:Er thin film deposited on the ZnO thin film substrate. One of the reason for this fact might be due to high conductivity the substrate. The other might be due to better crystallinity Of Y2O3:Er thin film deposited on the ZnO thin film substrate than that on the quartz and ITO substrates, because of the best crystallinity of the ZnO thin film substrate among three substrates. The Y2O3:Er thin film deposited at 500 degreesC on the ZnO thin film and annealed at 800 degreesC for 1 h in O-2 flow showed CL luminance of 70 cd/m(2) with pure green emission under excitation by electron beam with 3 kV, 60 muA/cm(2). (C) 2003 Elsevier Science B.V. All rights reserved.