We adopted high-resolution transmission electron microscopy (TEM) and scanning electron microscopy (SAM) to observe and analyze the microstructure of rare earth oxide (La2O3, Sc2O3) doped molybdenum cathodes. The results show that there are many nanometer particles in the molybdenum matrix besides some sub-micrometer particles in the crystal interfaces. All these particles are rare earth oxides as determined through calculating the electron diffraction pattern. Then we determined the electron work function and the zero-field emission current of molybdenum cathodes by the electron emission measurement. To correlate the emission data with surface composition, we use Auger electron spectroscopy (AES) to analyze the elements on the activated cathode surface and their depth profiles. We found that there were about 20 nm thick layers on an activated cathode surface, which have a high content of rare earth elements. We also use AES to analyze the elements diffusion to the cathode surface from cathode body during heating up to its operating temperature to find out which element positively affects the electron emission. (C) 2003 Published by Elsevier Science B.V.