Applied Surface Science, Vol.223, No.1-3, 54-61, 2004
High throughput synthesis and screening for functional materials
Synthesis and characterization tools designed for combinatorial materials science are described. The effectiveness of these tools is demonstrated through a well-known phase diagram study. An application of the technology to industrial product development is also described. (C) 2003 Published by Elsevier B.V.
Keywords:combinatorial material science;ion-beam sputtering;molecular beam epitaxy;scanning micro-beam;X-ray diffraction;fluorescence;crystal structural;composition mapping;scanning evanescent microwave probe;electrical impedance mapping;continuous phase diagram mapping;tunable dielectrics;tunable dielectric filters