We consider the development of a prospective way for fabrication of well-ordered 2D array of epitaxial nanodots and quasi-3D metalattices with spatially ordered particles. Mono- and multilayered opalline superlattices were used as an inorganic nanomask for fabrication of 2D ordered array of nanoobjects and metalattices composed from metals and semiconductors by deposition of different materials onto the substrate. With the help of developed nanotechnology, 2D and quasi-3D arrays of semiconductors (ZnO), metal nanodots (Ni, Ti) and nanoobjects with characteristic size of 100-300 nm were fabricated. Their structure and properties were investigated by SPM, electron and optical spectroscopy methods. Results and perspectives are discussed and analysed. (C) 2004 Published by Elsevier B.V.