An auger electron spectroscopy study was carried out on Rh-containing micro-structures grown by electron beam induced deposition (EBID) of the iso-structural and iso-electronic precursors [RhCl(PF3)(2)](2) and [RhCI(CO)(2)](2). A material containing between 55 and 60 at.% Rh was obtained from both precursors. The chemical composition of structures grown from the two different precursors indicates a similar decomposition mechanism. Deposits grown from [RhCl(PF3)(2)](2) showed a chemical composition independent of electron energy and electron dose in the investigated range of conditions. (C) 2004 Elsevier B.V. All rights reserved.