Thin iron oxide layers prepared "in situ" in the ultra high vacuum on polycrystalline iron substrate were investigated by electron spectroscopy methods-X-ray photoelectron spectroscopy (XPS) and elastic peak electron spectroscopy (EPES), using spectrometer ADES-400. The texture and the average grain size of the iron substrate foil have been examined by glancing angle X-ray diffraction (XRD). Qualitative and quantitative estimation of investigated oxide layers was made using (i) the relative sensitivity factor XPS method, (ii) comparison of binding energy shifts of Fe 2p photoelectron line and (iii) non-linear fitting procedure of Fe 2p photoelectron lines. Both, sputter-clean polycrystalline iron substrate and finally grown Fe2.2O3 layer, were investigated by the EPES method to measure the electron transport parameters used for quantitative electron spectroscopy, such as the electron inelastic mean free path (IMFP) values. The IMFPs were measured in the electron kinetic energy range 200-1000 eV with the Cu standard. The surface excitation parameters using Chen and Werner et al. approaches were evaluated and applied for correcting these IMFPs. The discrepancies between the evaluated parameters obtained using the above quantitative and qualitative approaches for characterising the iron oxide layers were discussed. (c) 2005 Elsevier B.V. All rights reserved.