We developed a scanning microwave microscope (S mu M) designed for high-throughput electric-property screening as well as for rapid construction of electronic phase diagrams at low temperatures. As a sensor probe, we used a high-Q lambda/4 coaxial cavity resonator to which a thin needle with ball-tip end was attached. The sensor module was Mounted on the low-temperature XYZ stage, which allowed us to map out the change of resonance frequency and quality factor due to the local tip-sample interaction at low temperatures. From the measurements of combinatorial thin films, such as Ti1-xCoxO2-delta and Nd0.9Ca0.1Ba2Cu3O7-delta (NCBCO), it was demonstrated that this S mu M system has enough performance for the high-throughput characterization of sample conductance under variable temperature conditions. (c) 2005 Elsevier B.V. All rights reserved.