Surface excitations are important in surface sensitive electron spectroscopes, especially in elastic peak electron spectroscopy (EPES) since they may distort quantitative information. This phenomenon is more pronounced at low electron energy and glancing emission angles and should be appropriately corrected. In the present work we investigate quantitatively the role of contaminations, density and surface excitations on electron inelastic mean free paths (IMFPs) in Ti determined by elastic peak electron spectroscopy (EPES) using Cu standard. In the Monte Carlo algorithm the new NIST 3.1 database of electron elastic scattering cross sections was applied. It has been also shown that accounting for surface excitations, as well as for appropriate input parameters (surface composition, density, hydrogen) in the EPES method, is important for accuracy of evaluated IMFPs. Due to high reactivity of Ti, the IMFPs for contaminated Ti may be of interest. The authors indicate the magnitude of various corrections on the IMFPs derived by EPES. (c) 2005 Elsevier B.V. All rights reserved.