Nitrogen-doped titanium oxide (TiOxNy) films were prepared with ion-assisted electron-beam evaporation. The nitrogen (N) incorporated in the film is influenced by the N, flux modulated by the N, flow rate through an ion gun. The TiOxNy films have the absorption edge of TiO2 red-shifted to 500 nm and exhibit visible light-induced photocatalytic properties in the surface hydrophilicity and the degradation of methylene blue. The structures and states of nitrogen in the films are investigated by X-ray diffraction patterns (XRD), and X-ray photoelectron spectroscopy (XPS) and related to their visible light-induced photocatalytic properties. The results indicate that the substitutional N in anatase TiO2 can induce visible light photocatalysis. The substitutional N is readily doped by the energetic nitrogen ions from the ion gun. The best photocatalytic activity is obtained at the largest N loading about 5.6 at.%, corresponding to the most substitutional N in anatase TiO2. The film exhibits the degradation of methylene blue with a rate-constant (k) about 0.065 h(-1) and retaining 7 degrees water contact angle on the surface under visible light illumination. (c) 2005 Elsevier B.V. All rights reserved.