In this study we apply ion-beam supported preparation techniques for both mesa formation by trench sputtering and FIB 'lift-out' lamella cutting for dynamic SIMS and TEM analysis of laser-fired Al point contacts on Si, respectively. Detailed compositional and structural informations about the metallurgical contact formation process are obtained combining both characterization techniques. While TEM micrographs and microdiffraction patterns reveal a mixture of Al- and Si-crystals within the similar to 1 mu m thick Al rich re-solidified surface layer according to the AI-Si phase diagram, spatially resolved SIMS depth profiling indicates ppm-range Al-diffusion a few hundred nm into the buried, substantially undisturbed Si-lattice. (c) 2006 Elsevier B.V. All rights reserved.