Applied Surface Science, Vol.253, No.1, 106-111, 2006
Novel methods and universal software for HRXRD, XRR and GISAXS data interpretation
Several novel methods for evaluation and interpretation of X-ray data from modern nanostructures are presented along with their applications. The background of methods and their relations to fundamental problems of X-ray analysis is shortly described. The key features of LEPTOS software, which is designed for the analysis of X-ray data measured with various geometries and setups and implements all discussed techniques, are discussed. (c) 2006 Elsevier B.V. All rights reserved.
Keywords:X-ray diffraction;X-ray reflectivity;diffuse scattering;grazing-incidence small angle scattering